Tipărire 

MEMSMAT

PROJECT TITLE: TRIBOMECHANICAL CHARACTERIZATION OF MEMS MATERIALS FOR SPACE APPLICATIONS UNDER HARSH ENVIRONMENTS — MEMSMAT

Coordinator: Technical University of Cluj-Napoca — UTCN 

Partners: National Institute for R&D in Microtechnologies — IMT Bucharest

Period: 9 December 2013 - 8 Dece,ber 2016

Project director: Prof.Dr.Eng. Corina Birleanu

Project team:

Key persons of participant UTC-N:

Key persons of participant IMT Bucharest:

Description: The accuracy detection, the reliability and the lifetime of MEMS are crucial parameters in space applications and these are strongly influenced by the material properties. In this project theoretical analysis, simulations and experimental validations will be performed in order to analyze the effect of environmental conditions on MEMS material properties and on MEMS structures behavior from space applications. In view of the harsh and remote environment of space, reliability and qualification is a crucial issue of MEMS.

Project goal: The main scope of project is the accuracy characterization of the mechanical and tribological properties of MEMS materials in different envitomental conditions and their correlation with MEMS structures considering multiphysics coupling effect in order to obtain an excellent reliability and high lifetime of MEMS from space applications.

Project objectives:

Activities:

Contributions to the STAR programme objectives: -

Homepage: MEMSMAT